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MEMS technology enables low-cost mini-SEM.

Subjects: *SCANNING electron microscopes; *ELECTRON microscopes; *MICROELECTROMECHANICAL systemsJAPANHORIBA Ltd. ; ULVAC Inc.

• Source: Solid State Technology. Oct2004, Vol. 47 Issue 10, p20-20. 3/4p.

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Light and sound from nanocrystalline silicon.

• Authors : Kimura, Masahide¹

Subjects: *ACTUATORS; *NANOCRYSTALS; *SILICONTOKYO (Japan); JAPAN

• Source: Solid State Technology. Jun2004, Vol. 47 Issue 6, p20-22. 2p. 1 Diagram, 1 Graph.

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